Nanolithography: The Art of Fabricating Nanoelectronic And Nanophotonic Devices And Systems by M Feldman
2013 | ISBN: 0857095005 | English | 592 pages | PDF | 42 MB
Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.